most citedDirect integration of atomic precision advanced manufacturing into middle-of-line silicon fabrication

3 citations · 5 across the 2 of their papers we have counts for

collaborators

2 papers

physics.app-ph2025★ 3 cited

Direct integration of atomic precision advanced manufacturing into middle-of-line silicon fabrication

E. M. Anderson, C. R. Allemang, A. J. Leenheer +13

Atomic precision advanced manufacturing (APAM) dopes silicon with enough carriers to change its electronic structure and can be used to create novel devices by defining metallic re…

cond-mat.mtrl-sci2025★ 2 cited

A reduced-temperature process for preparing atomically clean Si(100) and SiGe(100) surfaces with vapor HF

Luis Fabián Peña, Evan M. Anderson, John P. Mudrick +4

Silicon processing techniques such as atomic precision advanced manufacturing (APAM) and epitaxial growth require surface preparations that activate oxide desorption (typically >10…