Showing 2024Show all
2 papers · 1 filter
physics.app-ph2024
Low Temperature Deposition of Functional Thin Films on Insulating Substrates: Selective Ion Acceleration using Synchronized Floating Potential HiPIMS
Jyotish Patidar, Oleksandr Pshyk, Lars Sommerhäuser +1
Ionized physical vapor deposition techniques, such as high-power impulse magnetron sputtering (HiPIMS) are gaining popularity due to their ability to produce high-quality thin film…
cond-mat.mtrl-sci2024
Reducing the oxygen contamination in conductive (Ti,Zr)N coatings via RF-bias assisted reactive sputtering
K. Thorwarth, M. Watroba, O. Pshyk +6
Ternary transition metal nitride coatings are promising for many applications as they can offer improved hardness and oxidation resistance compared to binary counterparts. A common…