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physics.comp-ph2022★ 6 cited
Modeling Incomplete Conformality during Atomic Layer Deposition in High Aspect Ratio Structures
Luiz Felipe Aguinsky, Frâncio Rodrigues, Tobias Reiter +4
Atomic layer deposition allows for precise control over film thickness and conformality. It is a critical enabler of high aspect ratio structures, such as 3D NAND memory, since its…
math-ph2022★ 10 cited
Gauge-Invariant Semi-Discrete Wigner Theory
Mihail Nedjalkov, Mauro Ballicchia, Robert Kosik +1
A gauge-invariant Wigner quantum mechanical theory is obtained by applying the Weyl-Stratonovich transform to the von Neumann equation for the density matrix. The transform reduces…