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Characterization of Acoustic Losses in Interdigitated VHF to mmWave Piezoelectric M/NEMS Resonators
Luca Colombo, Gabriel Giribaldi, Ryan Tetro +6
This work reports on a technology-agnostic and frequency-independent methodology combining a-priori modeling, Finite Element Analysis (FEA), and experimental results for the charac…
2-16 GHz Multifrequency X-Cut Lithium Niobate NEMS Resonators on a Single Chip
Ryan Tetro, Luca Colombo, Matteo Rinaldi
This work presents the design, fabrication, and testing of X-Cut Lithium Niobate (LN) acoustic nanoelectromechanical (NEMS) Laterally Vibrating Resonators (LVRs) and Degenerate LVR…
Scandium Aluminum Nitride Overmoded Bulk Acoustic Resonators for Future Wireless Communication
Walter Gubinelli, Pietro Simeoni, Ryan Tetro +2
This work reports on the modeling, fabrication, and experimental characterization of a 13 GHz 30% Scandium-doped Aluminum Nitride (ScAlN) Overmoded Bulk Acoustic Resonator (OBAR) f…