2 papers
eess.SP2026
Optimized Sampling of Angle-Resolved Scatterometry Data Using End-to-End Compressed Learning Model for Nanograss Deficiency Detection
Mehdi Abdollahpour, Carsten Bockelmann, Armin Dekorsy
Reliable inspection of nanosurfaces is essential to ensure the quality of nanostructure manufacturing. Angle-resolved scatterometry provides a non-invasive inspection method that c…
eess.SP2025
Compressed Learning for Nanosurface Deficiency Recognition Using Angle-resolved Scatterometry Data
Mehdi Abdollahpour, Carsten Bockelmann, Tajim Md Hasibur Rahman +2
Nanoscale manufacturing requires high-precision surface inspection to guarantee the quality of the produced nanostructures. For production environments, angle-resolved scatterometr…