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physics.app-ph2025
Improving the lifetime of aluminum-based superconducting qubits through atomic layer etching and deposition
Neha Mahuli, Joaquin Minguzzi, Jiansong Gao +9
We present a dry surface treatment combining atomic layer etching and deposition (ALE and ALD) to mitigate dielectric loss in fully fabricated superconducting quantum devices forme…
physics.app-ph2025★ 15 cited
Low-Loss Superconducting Resonators Fabricated from Tantalum Films Grown at Room Temperature
Guillaume Marcaud, David Perello, Cliff Chen +16
The use of -tantalum in superconducting circuits has enabled a considerable improvement of the coherence time of transmon qubits. The standard approach to grow -tantalum thin…