3 papers
cond-mat.supr-con2026
Phase Formation and Thermal Stability of Superconducting Platinum Silicide Thin Films on Silicon
Tharanga R. Nanayakkara, Ananya Chattaraj, Mingzhao Liu +1
Platinum silicide (PtSi) thin films are promising for silicon-based superconducting quantum devices due to their compatibility with CMOS fabrication, air stability, and superconduc…
quant-ph2026
Tantalum Damascene Coplanar Waveguide Resonators Fabricated Using 300 mm Scale Processes
Ekta Bhatia, Yingge Du, Krishna P Koirala +12
Surface oxides contribute to losses in superconducting transmon devices resulting in degraded performance. We explore the use of the damascene process to replace the sidewall nativ…
cond-mat.supr-con2026
Effects of Integrated Heatsinking on Superconductivity in Tantalum Nitride Nanowires at the 300 Millimeter Scale
Ekta Bhatia, Tharanga R. Nanayakkara, Chenyu Zhou +14
We report the superconducting properties of tantalum nitride (TaN) nanowires and TaN/copper (TaN/Cu) bilayer nanowires fabricated on 300 mm silicon wafers using CMOS-compatible pro…