Modeling the Role of Secondary Electron Emission in Direct Current Magnetron Sputtering using Explicit Energy-Conserving Particle-in-Cell Methods

Daniel Main, Thomas G. Jenkins, Joseph G. Theis +5

We present results from a fully kinetic particle-in-cell (PIC) simulation of direct current magnetron sputtering (dcMS) in a 2D cylindrically symmetric geometry. The particle-in-ce…