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physics.optics2025
Dynamic Imaging of Periodic Structures using Extreme Ultraviolet Scatterometry
Brendan McBennett, Michael Tanksalvala, Emma E. Nelson +10
Dynamic scattering and imaging with coherent, ultrafast, extreme ultraviolet (EUV) light sources can resolve charge, phonon and spin processes on their intrinsic length and time sc…
physics.optics2025
Coherent EUV scatterometry of 2D periodic structure profiles with mathematically optimal experimental design
Clay Klein, Nicholas W. Jenkins, Yunzhe Shao +5
Extreme ultraviolet (EUV) scatterometry is an increasingly important metrology that can measure critical parameters of periodic nanostructured materials in a fast, accurate, and re…