most citedLaser micromachining of arbitrarily complex and overhang-free SiN nanomechanical resonators

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physics.ins-det2026

Detectivity and bandwidth limits of cooled and uncooled light detection using nanomechanical resonators

Mathis Turgeon-Roy, Mohammed Shakir, Zachary Louis-Seize +1

Nanomechanical resonators (NMRs) offer a promising alternative to traditional thermal-based radiation detectors due to their immunity to electrical noise. In recent years, these se…