3 citations · 6 across the 3 of their papers we have counts for
3 papers
cs.LG2025★ 3 cited
Sequence-Aware Inline Measurement Attribution for Good-Bad Wafer Diagnosis
Kohei Miyaguchi, Masao Joko, Rebekah Sheraw +1
How can we identify problematic upstream processes when a certain type of wafer defect starts appearing at a quality checkpoint? Given the complexity of modern semiconductor manufa…
cs.LG2025★ 2 cited
Wafer Defect Root Cause Analysis with Partial Trajectory Regression
Kohei Miyaguchi, Masao Joko, Rebekah Sheraw +1
Identifying upstream processes responsible for wafer defects is challenging due to the combinatorial nature of process flows and the inherent variability in processing routes, whic…
cs.CV2025★ 1 cited
Semiconductor SEM Image Defect Classification Using Supervised and Semi-Supervised Learning with Vision Transformers
Chien-Fu, Huang, Katherine Sieg +4
Controlling defects in semiconductor processes is important for maintaining yield, improving production cost, and preventing time-dependent critical component failures. Electron be…