13 citations · 22 across the 2 of their papers we have counts for
2 papers
physics.optics2007★ 9 cited
Goal Oriented Adaptive Finite Element Method for the Precise Simulation of Optical Components
L. Zschiedrich, S. Burger, J. Pomplun +1
Adaptive finite elements are the method of choice for accurate simulations of optical components. However as shown recently by Bienstman et al. many finite element mode solvers fai…
physics.optics2006★ 13 cited
Rigorous Simulation of 3D Masks
S. Burger, R. Köhle, L. Zschiedrich +4
We perform 3D lithography simulations by using a finite-element solver. To proof applicability to real 3D problems we investigate DUV light propagation through a structure of size…