2 papers
quant-ph2026
Investigation of tantalum films growth for coplanar resonators with internal quality factors above ten million
E. V. Zikiy, N. S. Smirnov, E. A. Krivko +13
Alpha-tantalum on silicon is a promising platform for high-coherence superconducting quantum circuits. However, the growth mechanism of alpha-tantalum on silicon remains poorly und…
cond-mat.mtrl-sci2025
Mutual control of critical temperature, residual resistance ratio, stress, and roughness for sputtered Nb films
E. V. Zikiy, I. A. Stepanov, S. V. Bukatin +10
Superconducting single quantum logic integrated circuits traditionally exploit magnetron sputtered niobium thin films on silicon oxide substrates. The sputtering depends on multipl…