1 citations · 1 across the 1 of their papers we have counts for
3 papers
Investigation of tantalum films growth for coplanar resonators with internal quality factors above ten million
E. V. Zikiy, N. S. Smirnov, E. A. Krivko +13
Alpha-tantalum on silicon is a promising platform for high-coherence superconducting quantum circuits. However, the growth mechanism of alpha-tantalum on silicon remains poorly und…
Thermo-optic modulator with ultra-high extinction ratio for low-loss silicon nitride integrated photonics
Dmitriy Serkin, Kirill Buzaverov, Aleksandr Baburin +9
Extremely low-loss silicon nitride integrated circuits is a potential platform for a growing number of frontier applications in quantum technologies, high-performance and analog co…
Mutual control of critical temperature, residual resistance ratio, stress, and roughness for sputtered Nb films
E. V. Zikiy, I. A. Stepanov, S. V. Bukatin +10
Superconducting single quantum logic integrated circuits traditionally exploit magnetron sputtered niobium thin films on silicon oxide substrates. The sputtering depends on multipl…