Absolute Doubly Differential Angular Sputtering Yields for 20 keV Kr+ on Polycrystalline Cu

Caixia Bu, Liam S. Morrissey, Benjamin C. Bostick +16

We have measured the absolute doubly differential angular sputtering yield for 20 keV Kr+ impacting a polycrystalline Cu slab at an incidence angle of θi = 45° relative to the surf…