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quant-ph2026
Resist-free shadow deposition using silicon trenches for Josephson junctions in superconducting qubits
Tathagata Banerjee, Stephen Daniel Funni, Saswata Roy +2
Superconducting qubit fabrication innovations continue to be explored to achieve higher performance. Despite improvements to base layer fabrication and processing, resist-based Jos…
quant-ph2025★ 2 cited
Low-loss Nb on Si superconducting resonators from a dual-use spintronics deposition chamber and with acid-free post-processing
Maciej W. Olszewski, Jadrien T. Paustian, Tathagata Banerjee +13
Magnetic impurities are known to degrade superconductivity. For this reason, physical vapor deposition chambers that have previously been used for magnetic materials have generally…