Electrical Impedance Tomography with an Integrated Picoliter-Volume Subtractive Microfluidic Chamber in 65 nm CMOS

Antonio Victor Machado de Oliveira, Debjit Sarkar, Ali Hajimiri

Electrical impedance tomography with fully integrated microfluidics and electronics is presented for the first time in a CMOS chip. Chambers and electrodes are fabricated in the in…