Stoichiometric Epitaxial Strontium Titanate Thin Films on Silicon by High-Temperature Sr Segregation

Andries Boelen, Marina Baryshnikova, Maxim Korytov +4

Thin-film strontium titanate (SrTiO${}_3$, STO) layers grown on silicon require accurate stoichiometry and single-crystalline order to exploit their functional properties optimally.…