8 papers · 1 filter
Collisionless Bulk Electron Heating in Resonant Low-Voltage Capacitively Coupled Plasmas
Sarveshwar Sharma, Igor D. Kaganovich, Animesh Kuley +3
We investigate collisionless power absorption in resonant, lowpressure capacitively coupled plasmas (CCPs). In these radio-frequency (RF) discharges, the sheath capacitance almo…
Ion-neutral and neutral-neutral scattering in argon at KeV energies and implications for high-aspect-ratio etching
Alexander V. Khrabrov, Igor D. Kaganovich
In this study, we report a physical model and a Monte Carlo simulation scheme developed to predict the angular distributions of energetic argon atoms and ions as an ion beam passes…
Particle-In-Cell Informed Kinetic Modeling of Nonlinear Skin Effects in Low-Frequency Inductively Coupled Plasmas
Haomin Sun, Jian Chen, Alexander Khrabrov +4
We perform extensive 2D Particle-In-Cell (PIC) electromagnetic simulations of low pressure Inductively Coupled Plasma (ICP) discharges with various coil current and driving frequen…
Nonlinear skin effect regime when a radio frequency electromagnetic field penetrates into a background plasma
Haomin Sun, Jian Chen, Alexander Khrabrov +4
Two-dimensional, electromagnetic particle-in-cell simulations are employed to study particle kinetics and power deposition in the skin layer when a Radio Frequency (RF) electromagn…
Improved algorithm for a two-dimensional Darwin particle-in-cell code
Dmytro Sydorenko, Igor D. Kaganovich, Alexander V. Khrabrov +3
A two-dimensional particle-in-cell code for simulation of low-frequency electromagnetic processes in laboratory plasmas has been developed. The code uses the Darwin method omitting…
Investigating Instabilities in Magnetized Low-pressure Capacitively-Coupled RF Plasma using Particle-in-Cell (PIC) Simulations
Sathya Ganta, Kallol Bera, Shahid Rauf +5
The effect of a uniform magnetic field on particle transport in low-pressure radio frequency (RF) capacitively coupled plasma (CCP) has been studied using a particle-in-cell (PIC)…