5 papers
A Nonlinear Two-Sheath Circuit Model for Low-Pressure Symmetric and Asymmetric Capacitively Coupled Radio-Frequency Plasmas
Katharina Noesges, Tim Bolles, Máté Vass +2
We develop a nonlinear self-consistent two-sheath circuit model for low-pressure capacitively coupled plasmas that applies to geometrically symmetric as well as asymmetric discharg…
Multi-diagnostic characterization of inductively coupled discharges with tailored waveform substrate bias for precise control of plasma etching
Jonas Giesekus, Anton Pletzer, Florian Beckfeld +3
Precise control of ion energy distribution functions (IEDF) is crucial for selectivity as well as control over sputter rate and substrate damage in nanoscale plasma processes. In t…
Electronegativity effects on plasma dynamics in He/O RF microplasma jets at atmospheric pressure
Lukas Vogelhuber, Ihor Korolov, Mate Vass +6
This work investigates the transitions between ohmic mode and Penning-Gamma mode in a capacitively coupled radio frequency micro atmospheric pressure plasma jets (CCRF APPJ) ope…
Nonlinear Power Absorption in CCRF Discharges: Transition from Symmetric to Asymmetric Configurations
Katharina Noesges, Thomas Mussenbrock
This work builds upon previous studies of nonlinear dynamics in low-pressure capacitively coupled radio-frequency discharges, focusing on the electron power absorption mechanism in…
Nonlocal dynamics of secondary electrons in capacitively coupled radio frequency discharges
Katharina Noesges, Maximilian Klich, Aranka Derzsi +5
In capacitively coupled radio frequency (CCRF) discharges, the interaction of the plasma and the surface boundaries is linked to a variety of highly relevant phenomena for technolo…