16 citations · 19 across the 8 of their papers we have counts for
6 papers · 1 filter
Bimorph Lithium Niobate Piezoelectric Micromachined Ultrasonic Transducers
Vakhtang Chulukhadze, Zihuan Liu, Ziqian Yao +8
Piezoelectric micromachined ultrasonic transducers (PMUTs) are widely utilized in applications that demand mechanical resilience, thermal stability, and compact form factors. Recen…
Thermal Endurance of Suspended Thin-Film Lithium Niobate up to 800 °C
Mihir Chaudhari, Lezli Matto, Naveed Ahmed +8
The need for high-temperature piezoelectric microelectromechanical systems (MEMS) requires pushing piezoelectric platforms to their thermal limits. In harsh thermal environments, p…
An 11.7-GHz ScAlN FBAR Filter: Case Study on Scaling Limits and Challenges
Sinwoo Cho, Byeongjin Kim, Lezli Matto +9
This paper reports an 11.7 GHz compact 50 ohm ladder filter based on single layer Scandium Aluminum Nitride (ScAlN) film bulk acoustic resonators (FBARs) with platinum (Pt) electro…
Periodically Poled Piezoelectric Lithium Niobate Resonator for Piezoelectric Power Conversion
Ziqian Yao, Clarissa Daniel, Lezli Matto +8
As the demand for compact and efficient power conversion systems increases, piezoelectric power converters have gained attention for their ability to replace bulky magnetic inducto…
50 GHz Piezoelectric Acoustic Filter
Omar Barrera, Jack Kramer, Lezli Matto +5
This paper presents significant frequency scaling of acoustic filter technology to 50 GHz. This achievement is enabled by the P3F LiNbO3 multilayer stack, in which piezoelectric th…
Thin-film scandium aluminum nitride bulk acoustic resonator with high Q of 208 and K2 of 9.5% at 12.5 GHz
Sinwoo Cho, Yinan Wang, Eugene Kwon +9
This work describes sputtered scandium aluminum nitride (ScAlN) thin-film bulk acoustic resonators (FBAR) at 12.5 GHz with high electromechanical coupling (k2) of 9.5% and quality…