Low Leakage Ferroelectric Heteroepitaxial Al${}_{0.7}$Sc${}_{0.3}$N Films on GaN

Keisuke Yazawa, Charles Evans, Elizabeth Dickey +3

Wurtzite (Al,Sc)N ferroelectrics are attractive for microelectronics applications due to their chemical and epitaxial structural compatibility with wurtzite semiconductors such as…