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cs.OH2008
A New Four States High Deflection Low Actuation Voltage Electrostatic Mems Switch for RF Applications
Renaud Robin, Salim Touati, Karim Segueni +2
This paper presents a new electrostatic MEMS (MicroElectroMechanical System) based on a single high reliability totally free flexible membrane. Using four electrodes, this structur…
cs.OH2008
Low Voltage Totally Free Flexible RF MEMS Switch With Anti-Stiction System
Salim Touati, Nicolas Lorphelin, Alexandre Kanciurzewski +4
This paper concerns a new design of RF MEMS switch combined with an innovative process which enable low actuation voltage (<5V) and avoid stiction. First, the structure described w…