most citedPorous Alumina Based Capacitive MEMS RH Sensor

2 citations · 4 across the 6 of their papers we have counts for

collaborators

6 papers

cs.OH20082 cited

Modelling methodology of MEMS structures based on Cosserat theory

Mustafa Calis, Omar Laghrouche, Marc Desmulliez

Modelling MEMS involves a variety of software tools that deal with the analysis of complex geometrical structures and the assessment of various interactions among different energy…

cs.OH2008

Haptic sensing for MEMS with application for cantilever and Casimir effect

M. Calis, Marc Desmulliez

This paper presents an implementation of the Cosserat theory into haptic sensing technologies for real-time simulation of microstructures. Cosserat theory is chosen instead of the…

cs.OH2008

UV Direct-Writing of Metals on Polyimide

Jack Hoyd-Gigg Ng, Marc Desmulliez, Aongus Mccarthy +3

Conductive micro-patterned copper tracks were fabricated by UV direct-writing of a nanoparticle silver seed layer followed by selective electroless copper deposition. Silver ions w…

cs.OH2008

Megasonic Enhanced Electrodeposition

Jens Georg Kaufmann, Marc Desmulliez, D. Price

A novel way of filling high aspect ratio vertical interconnection (microvias) with an aspect ratio of >2:1 is presented. High frequency acoustic streaming at megasonic frequencies…

cs.OH2008

Design Methodology and Manufacture of a Microinductor

D. Flynn, Marc Desmulliez

Potential core materials to supersede ferrite in the 0.5-10 MHz frequency range are investigated. The performance of electrodeposited nickel-iron, cobalt-iron-copper alloys and the…

cs.OH20082 cited

Porous Alumina Based Capacitive MEMS RH Sensor

L. Juhasz, A. Vass-Varnai, Veronika Timar-Horvath +2

The aim of a joint research and development project at the BME and HWU is to produce a cheap, reliable, low-power and CMOS-MEMS process compatible capacitive type relative humidity…