2 citations · 2 across the 3 of their papers we have counts for
6 papers
Modeling and Design of a Diaphragm-Integrated Photonic Waveguide Microphone
Xiaoyu Niu, Yuqi Meng, Zihuan Liu +2
Can an integrated optical readout improve the useful operating range of a miniature microphone? We address this question with an analytical model of a diaphragm carrying the sensin…
Performance Analysis and Design of an Optomechanical Microphone Using an Integrated Photonic Waveguide Interferometer
Xiaoyu Niu, Yuqi Meng, Zihuan Liu +2
We present an optomechanical microphone based on a diaphragm-integrated photonic waveguide Mach-Zehnder interferometer. Acoustic pressure deforms the MEMS diaphragm, inducing strai…
High-Velocity Whip-Mode Microresonator in LTOI Unimorph: Measurement Methodology and Large-Signal Characterization
Tzu-Hsuan Hsu, Zihuan Liu, Harshvardhan Gupta +6
This paper presents the design, characterization, and large-signal measurement methodology of a high-order whip-mode flexural microresonator on a lithium tantalate-on-insulator (LT…
MEMS Microphones as Ultrasonic Transducers: Nonlinear Electrostatic Actuation and a Parametric Array Prototype
Xiaoyu Niu, Zihuan Liu, Ehsan Vatankhah +2
This paper investigates commercial-style capacitive MEMS microphone dies as air-coupled ultrasonic transmitters under nonlinear pull-in and snap-back actuation and demonstrates a c…
Bimorph Lithium Niobate Piezoelectric Micromachined Ultrasonic Transducers
Vakhtang Chulukhadze, Zihuan Liu, Ziqian Yao +8
Piezoelectric micromachined ultrasonic transducers (PMUTs) are widely utilized in applications that demand mechanical resilience, thermal stability, and compact form factors. Recen…
Bimorph Lithium Niobate Piezoelectric Micromachined Ultrasonic Transducer
Ziqian Yao, Vakhtang Chuluhadze, Zihuan Liu +5
This work demonstrates a prototype bi-layer piezoelectric micromachined ultrasonic transducer (PMUT) based on transferred periodically poled piezoelectric film (P3F) X-cut lithium…