3 citations · 3 across the 3 of their papers we have counts for
4 papers · 1 filter
Improving Optical Metrology by Engineering the Target Environment
Thomas A. Grant, Cheng-Hung Chi, Kevin F. MacDonald +1
Measurements of positional coordinates and dimensions - whether by human vision or optical instrumentation - are fundamental to safety, industrial productivity, manufacturing quali…
Resolving Complex Subwavelength Grating Structures Using Topologically Structured Light
Thomas A. Grant, Eric Plum, Nikolay I. Zheludev +1
It has been seen recently that when probing a nanoscale object to determine, for example, size or position via light scattering, significant advantage in measurement precision can…
Controlling the Flow of Information in Optical Metrology
Maximilian Weimar, Huanli Zhou, Luca Neubacher +5
Optical metrology has progressed beyond the Abbe-Rayleigh limit, unlocking (sub)atomic precision by leveraging nonlinear phenomena, statistical accumulation, and AI estimators trai…
Localization of nanoscale objects with light singularities
Thomas A. Grant, Anton N. Vetlugin, Eric Plum +2
Unprecedented atomic-scale measurement resolution has recently been demonstrated in single-shot optical localization metrology based on deep-learning analyses of diffraction patter…