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physics.optics2025
Resolving Complex Subwavelength Grating Structures Using Topologically Structured Light
Thomas A. Grant, Eric Plum, Nikolay I. Zheludev +1
It has been seen recently that when probing a nanoscale object to determine, for example, size or position via light scattering, significant advantage in measurement precision can…
physics.optics2025
Controlling the Flow of Information in Optical Metrology
Maximilian Weimar, Huanli Zhou, Luca Neubacher +5
Optical metrology has progressed beyond the Abbe-Rayleigh limit, unlocking (sub)atomic precision by leveraging nonlinear phenomena, statistical accumulation, and AI estimators trai…