49 citations · 130 across the 12 of their papers we have counts for
12 papers
Nonlinear Characterization of Thin-Film LiNbO3 Acoustic Filters
Omar Barrera, Bryan T. Bosworth, Taran Anusorn +10
Compact, high-performance components in millimeter-wave (mmWave) communication systems demand new acoustic filter technology at increasingly higher frequencies. Among various promi…
Bimorph Lithium Niobate Piezoelectric Micromachined Ultrasonic Transducers
Vakhtang Chulukhadze, Zihuan Liu, Ziqian Yao +8
Piezoelectric micromachined ultrasonic transducers (PMUTs) are widely utilized in applications that demand mechanical resilience, thermal stability, and compact form factors. Recen…
62.6 GHz ScAlN Solidly Mounted Acoustic Resonators
Yinan Wang, Byeongjin Kim, Nishanth Ravi +13
We demonstrate a record-high 62.6 GHz solidly mounted acoustic resonator (SMR) incorporating a 67.6 nm scandium aluminum nitride (Sc0.3Al0.7N) piezoelectric layer on a 40 nm buried…
Thermal Endurance of Suspended Thin-Film Lithium Niobate up to 800 °C
Mihir Chaudhari, Lezli Matto, Naveed Ahmed +8
The need for high-temperature piezoelectric microelectromechanical systems (MEMS) requires pushing piezoelectric platforms to their thermal limits. In harsh thermal environments, p…
An 11.7-GHz ScAlN FBAR Filter: Case Study on Scaling Limits and Challenges
Sinwoo Cho, Byeongjin Kim, Lezli Matto +9
This paper reports an 11.7 GHz compact 50 ohm ladder filter based on single layer Scandium Aluminum Nitride (ScAlN) film bulk acoustic resonators (FBARs) with platinum (Pt) electro…
Periodically Poled Piezoelectric Lithium Niobate Resonator for Piezoelectric Power Conversion
Ziqian Yao, Clarissa Daniel, Lezli Matto +8
As the demand for compact and efficient power conversion systems increases, piezoelectric power converters have gained attention for their ability to replace bulky magnetic inducto…
50 GHz Piezoelectric Acoustic Filter
Omar Barrera, Jack Kramer, Lezli Matto +5
This paper presents significant frequency scaling of acoustic filter technology to 50 GHz. This achievement is enabled by the P3F LiNbO3 multilayer stack, in which piezoelectric th…
Thin-film scandium aluminum nitride bulk acoustic resonator with high Q of 208 and K2 of 9.5% at 12.5 GHz
Sinwoo Cho, Yinan Wang, Eugene Kwon +9
This work describes sputtered scandium aluminum nitride (ScAlN) thin-film bulk acoustic resonators (FBAR) at 12.5 GHz with high electromechanical coupling (k2) of 9.5% and quality…
Acoustic resonators above 100 GHz
Jack Kramer, Bryan T. Bosworth, Lezli Matto +8
Piezoelectric resonators are a common building block for signal processing because of their miniature size, low insertion loss, and high quality factor. As consumer electronics pus…
Transferred Thin Film Lithium Niobate as Millimeter Wave Acoustic Filter Platforms
Omar Barrera, Sinwoo Cho, Kenny Hyunh +6
This paper reports the first high-performance acoustic filters toward millimeter wave (mmWave) bands using transferred single-crystal thin film lithium niobate (LiNbO3). By transfe…
Thin-Film Lithium Niobate Acoustic Resonator with High Q of 237 and k2 of 5.1% at 50.74 GHz
Jack Kramer, Vakhtang Chulukhadze, Kenny Huynh +6
This work reports a 50.74 GHz lithium niobate (LiNbO3) acoustic resonator with a high quality factor (Q) of 237 and an electromechanical coupling (k2) of 5.17% resulting in a figur…
Thin-Film Lithium Niobate Acoustic Filter at 23.5 GHz with 2.38 dB IL and 18.2% FBW
Omar Barrera, Sinwoo Cho, Lezli Matto +6
This work reports an acoustic filter at 23.5 GHz with a low insertion loss (IL) of 2.38 dB and a 3-dB fractional bandwidth (FBW) of 18.2%, significantly surpassing the state-of-the…