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20242026
most citedDesign, fabrication and initial test of a novel 3D-Trench sensor utilizing 8-inch CMOS compatible technology

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physics.ins-det2025

Development of 3D Pixel Sensors via an 8-inch CMOS-Compatible Process

Huimin Ji, Zhihua Li, Wenzheng Cheng +6

In the construction of High-Luminosity Large Hadron Collider (HL-LHC) and Future Circular Collider (FCC) experiments, 3D pixel sensors have become indispensable components due to t…