19 citations · 19 across the 5 of their papers we have counts for
6 papers
Accurate Reporting of Ion Time-of-Flight during HiPIMS with Gated Front-End Mass Spectrometry
Nathan Rodkey, Jyotish Patidar, Kerstin Thorwarth +1
The quality of high-power impulse magnetron sputtering (HiPIMS) deposited films can often improve through the effective use of metal-ion acceleration, requiring precise measurement…
Accelerating the development of oxynitride thin films: A combinatorial investigation of the Al-Si-O-N system
Stefanie Frick, Oleksandr Pshyk, Arnold Müller +3
Oxynitrides are used in a variety of applications including photocatalysts, high-k dielectrics or wear-resistant coatings and often show intriguing multi-functionality. To accelera…
Reducing the oxygen contamination in conductive (Ti,Zr)N coatings via RF-bias assisted reactive sputtering
K. Thorwarth, M. Watroba, O. Pshyk +6
Ternary transition metal nitride coatings are promising for many applications as they can offer improved hardness and oxidation resistance compared to binary counterparts. A common…
Deposition of highly-crystalline AlScN thin films using synchronized HiPIMS -- from combinatorial screening to piezoelectric devices
Jyotish Patidar, Kerstin Thorwarth, Thorsten Schmitz-Kempen +2
Fueled by the 5G revolution, the demand for advanced radio frequency micro-electromechanical systems (MEMS) based on AlScN is growing rapidly. However, synthesizing high-quality, t…
Combinatorial Reactive Sputtering with Auger Parameter Analysis Enables Synthesis of Wurtzite Zn2TaN3
Siarhei Zhuk, Alexander Wieczorek, Amit Sharma +4
The discovery of new functional materials is one of the key challenges in materials science. Combinatorial high-throughput approaches using reactive sputtering are commonly employe…
Improving the crystallinity and texture of oblique-angle-deposited AlN thin films using reactive synchronized HiPIMS
Jyotish Patidar, Amit Sharma, Siarhei Zhuk +7
Many technologies require highly-oriented and textured functional thin films. The most common synthe-sis approaches use on-axis sputter geometries. However, in some scenarios, on-a…