2 papers
math-ph2025
Operator-Consistent Physics-Informed Learning for Wafer Thermal Reconstruction in Lithography
Ze Tao, Fujun Liu, Yuxi Jin +6
Thermal field reconstruction in post-exposure bake (PEB) is critical for advanced lithography, yet current physics-informed neural networks (PINNs) suffer from inconsistent accurac…
cs.CV2023
Depth and DOF Cues Make A Better Defocus Blur Detector
Yuxin Jin, Ming Qian, Jincheng Xiong +2
Defocus blur detection (DBD) separates in-focus and out-of-focus regions in an image. Previous approaches mistakenly mistook homogeneous areas in focus for defocus blur regions, li…