Synchronized Opto-Electro-Mechanical Measurements for Energy Loss Estimation in Thin-Film-Piezoelectric-on-Substrate MEMS/NEMS Devices

Vishnu Kumar, Sudhanshu Tiwari, Gayathri Pillai +2

Piezoelectric micro-electro-mechanical systems have significant market potential owing to their superior capabilities of transduction to those of standard capacitive and piezoresis…