2 papers
physics.ins-det2025
Quantifying the Full Damage Profile of Focused Ion Beams via 4D-STEM Precession Electron Diffraction and PSNR Metrics
M. G. Masteghin, Z. P. Aslam, A. P. Brown +4
Focused ion beams (FIBs) are widely used in nanofabrication for applications such as circuit repair, ultra-thin lamella preparation, strain engineering, and quantum device prototyp…
cond-mat.mtrl-sci2023
Detection Sensitivity Limit of Hundreds of Atoms with X-Ray Fluorescence Microscopy
Mateus G. Masteghin, Toussaint Gervais, Steven K. Clowes +10
We report X-ray fluorescence (XRF) imaging of nanoscale inclusions of impurities for quantum technology. A very bright diffraction-limited focus of the X-ray beam produces very hig…