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physics.optics2025
Process-structure-property relationships in subtractive fabrication of silicon nitride microresonators for nonlinear photonics
Lala Rukh, Gabriel M. Colación, Franco H. Buck +1
Silicon nitride (SiN) has emerged as a popular platform for nonlinear photonics due to its large bandgap, relatively large nonlinear index of refraction, and high degree of CMOS-co…
physics.optics2025
Low-loss silicon nitride Kerr-microresonators fabricated with metallic etch masks via metal lift-off
Gabriel M. Colacion, Lala Rukh, Franco Buck +1
Stoichiometric silicon nitride has emerged as a widely used integrated photonic material owing to its high index of refraction, nonlinear optical properties, and broad transparency…