Direct Observation of Nanoscale Polarization Switching in HZO Ferroelectrics Using STEM-EBIC

Prasanna Venkatesan, Taeyoung Song, Yueyun Chen +22

We report the experimental observation of discrete ferroelectric switching down to 0.475 nm x 0.475 nm in HfO2-based ferroelectrics using correlated STEM electron beam induced curr…