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physics.optics2025
Nanoelectromechanical spectral control of silicon bowtie nanocavities for quantum light sources
Sergei Lepeshov, Daniel Alec Farbowitz, Thor August Schimmell Weis +4
We present the design, fabrication, and characterization of tunable waveguide-coupled silicon bowtie cavities with strong spatial electromagnetic field confinement. We use nanoelec…
physics.optics2023
Design, fabrication, and characterization of electrostatic comb-drive actuators for nanoelectromechanical silicon photonics
Thor August Schimmell Weis, Babak Vosoughi Lahijani, Konstantinos Tsoukalas +2
Nanoelectromechanical systems offer unique functionalities in photonics: The ability to elastically and reversibly deform dielectric beams with subwavelength dimensions enable elec…