2 citations · 4 across the 10 of their papers we have counts for
12 papers
High-Velocity Whip-Mode Microresonator in LTOI Unimorph: Measurement Methodology and Large-Signal Characterization
Tzu-Hsuan Hsu, Zihuan Liu, Harshvardhan Gupta +6
This paper presents the design, characterization, and large-signal measurement methodology of a high-order whip-mode flexural microresonator on a lithium tantalate-on-insulator (LT…
Bimorph Lithium Niobate Thickness-Shear Overtone Film Bulk Acoustic Resonator
Ziqian Yao, Ian Anderson, Tzu-Hsuan Hsu +3
High quality factor () and overtone operation enable narrow-linewidth acoustic devices with multiple discrete frequencies in a single cavity. Maintaining both high and suffi…
Single-Crystal AlN Wafer-Based Bulk Acoustic Resonators for Piezoelectric Power Conversion
Ziqian Yao, Clarissa Daniel, Kaicheng Pan +5
In this work, we demonstrate the first single-crystal aluminum nitride (AlN) wafer-based thickness-extensional (TE) mode bulk acoustic resonator for piezoelectric power conversion.…
Lattice XBAR Filters in Thin-Film Lithium Niobate
Taran Anusorn, Byeongjin Kim, Ian Anderson +2
This work presents the demonstration of lattice filters based on laterally excited bulk acoustic resonators (XBARs). Two filter implementations, namely direct lattice and layout-ba…
Bimorph Lithium Niobate Piezoelectric Micromachined Ultrasonic Transducers
Vakhtang Chulukhadze, Zihuan Liu, Ziqian Yao +8
Piezoelectric micromachined ultrasonic transducers (PMUTs) are widely utilized in applications that demand mechanical resilience, thermal stability, and compact form factors. Recen…
Residual Stress Anisotropy In Thin-Film Lithium Niobate For Stress-Managed MEMS
Byeongjin Kim, Ian Anderson, Tzu-Hsuan Hsu +4
In this work, we present the first experimental study of residual stress and post-release beam deflection in 128-degree Y-cut thin-film lithium niobate (TFLN) on Si, revealing pron…
Radial Mode Lithium Niobate Rosen Transformer
Ziqian Yao, Heather Chang, Eric Stolt +4
In this work, we demonstrate the first two-port radial-mode Rosen transformer based on 36Y-cut lithium niobate (LN) for piezoelectric power conversion. The device achieve…
Bimorph Lithium Niobate Piezoelectric Micromachined Ultrasonic Transducer
Ziqian Yao, Vakhtang Chuluhadze, Zihuan Liu +5
This work demonstrates a prototype bi-layer piezoelectric micromachined ultrasonic transducer (PMUT) based on transferred periodically poled piezoelectric film (P3F) X-cut lithium…
Thermal Endurance of Suspended Thin-Film Lithium Niobate up to 800 °C
Mihir Chaudhari, Lezli Matto, Naveed Ahmed +8
The need for high-temperature piezoelectric microelectromechanical systems (MEMS) requires pushing piezoelectric platforms to their thermal limits. In harsh thermal environments, p…
Periodically Poled Piezoelectric Lithium Niobate Resonator for Piezoelectric Power Conversion
Ziqian Yao, Clarissa Daniel, Lezli Matto +8
As the demand for compact and efficient power conversion systems increases, piezoelectric power converters have gained attention for their ability to replace bulky magnetic inducto…
Practical Demonstrations of FR3-Band Thin-Film Lithium Niobate Acoustic Filter Design
Taran Anusorn, Omar Barrera, Jack Kramer +4
This article presents an approach to control the operating frequency and fractional bandwidth (FBW) of miniature acoustic filters in thin-film lithium niobate (TFLN). More specific…
Lithium Tantalate Bulk Acoustic Resonator For Piezoelectric Power Conversion
Ziqian Yao, Clarissa Daniel, Eric Stolt +3
We present the first lithium tantalate (LT) thickness-extensional (TE) mode bulk acoustic resonators designed for piezoelectric power conversion, showcasing a low temperature coeff…