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cs.CE2026
Graph Attention-Based Virtual Metrology for Film Deposition Processes in Semiconductor Manufacturing
Tao Han, Suk Ki Lee, Hyunwoong Ko
Artificial intelligence-driven semiconductor manufacturing increasingly operates at nanometer and angstrom scales, where precise process control depends on accurate and timely metr…
cs.CE2025★ 1 cited
Generative Multimodal Multiscale Data Fusion for Digital Twins in Aerosol Jet Electronics Printing
Fatemeh Elhambakhsh, Suk Ki Lee, Hyunwoong Ko
The rising demand for high-value electronics necessitates advanced manufacturing techniques capable of meeting stringent specifications for precise, complex, and compact devices, d…