Synthesis of epitaxial TaO${}_2$ thin films on Al${}_2$O${}_3$ by suboxide molecular-beam epitaxy and thermal laser epitaxy

Yorick A. Birkhölzer, Anna S. Park, Noah Schnitzer +28

Tantalum dioxide (TaO2) is a metastable tantalum compound. Here, we report the epitaxial stabilization of TaO2 on Al2O3 (1-102) (r-plane sapphire) substrates using suboxide molecul…