Structural and Thermal Stability of B4C/Ru Multilayers with Carbon Barrier Layers

A. V. Bugaev, S. S. Sakhonenkov, A. U. Gaisin +3

The chemical interaction between Mo and Ru layers in multilayer structures depending on the thickness ratio ($\Gamma$) was carried out using X-ray photoelectron spectroscopy (XPS), X-ra…