Local distortions as a source of piezoelectric/stiffness decoupling in B-doped AlScN

Laszlo Wolf, Geoff L. Brennecka, Vladan Stevanović

We present a first-principles analysis of the wurtzite pseudo-ternary (Al,Sc,B)N to elucidate the structural origin of a decoupling between stiffness $C_{33}$ and piezoelectric res…