most citedStep bunching of vicinal 6H-SiC{0001} surfaces

67 citations · 67 across the 1 of their papers we have counts for

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1 paper

cond-mat.mtrl-sci2009★ 67 cited

Step bunching of vicinal 6H-SiC{0001} surfaces

Valery Borovikov, Andrew Zangwill

We use kinetic Monte Carlo simulations to understand growth- and etching-induced step bunching of 6H-SiC{0001} vicinal surfaces oriented towards [1-100] and [11-20]. By taking acco…