4 papers
Toward the Origins of Binding Energy Shifts and Satellites Formation During Plasma-XPS Measurements
J. Trey Diulus, Ashley R. Head, Jorge Anibal Boscoboinik +3
In plasma X ray photoelectron spectroscopy emerges as a powerful platform for real time, in situ chemical analysis under conditions relevant to semiconductor processing and other p…
Operando XPS in Reactive Plasmas: The Importance of The Wall Reactions
J. Trey Diulus, Ashley R. Head, Jorge Anibal Boscoboinik +1
Advancements in differential pumping and electron optics over the past few decades have enabled x-ray photoelectron spectroscopy (XPS) measurements at (near-)ambient pressures, bri…
Operando Plasma-XPS for Process Monitoring: Hydrogenation of Copper Oxide Confined Under h-BN Case Study
J. Trey Diulus, Andrew E. Naclerio, Anibal Boscoboinik +4
We demonstrate that ambient pressure x-ray photoelectron spectroscopy (APXPS) can be used for in situ studies of dynamic changes in surface chemistry in a plasma environment. Hexag…
Ultrathin Magnesium-based Coating as an Efficient Oxygen Barrier for Superconducting Circuit Materials
Chenyu Zhou, Junsik Mun, Juntao Yao +15
Scaling up superconducting quantum circuits based on transmon qubits necessitates substantial enhancements in qubit coherence time. Among the materials considered for transmon qubi…