3 papers
cond-mat.mtrl-sci2025
Directional atomic layer etching of MgO-doped lithium niobate using Br-based plasma
Ivy I. Chen, Mariya Ezzy, Emily Hsue-Chi Shi +8
Lithium niobate (LiNbO, LN) is a nonlinear optical material of high interest for integrated photonics with applications ranging from optical communications to quantum informati…
cond-mat.supr-con2023
Plasma-enhanced atomic layer deposition of titanium nitride for superconducting devices
John Femi-Oyetoro, Sasha Sypkens, Henry LeDuc +4
This study presents a comprehensive investigation into the exceptional superconducting attributes of titanium nitride (TiN) achieved through plasma-enhanced atomic layer deposition…
cond-mat.mes-hall2023
Isotropic atomic layer etching of MgO-doped lithium niobate using sequential exposures of H and SF plasmas
Ivy I. Chen, Jennifer Solgaard, Ryoto Sekine +7
Lithium niobate (LiNbO, LN) is a ferroelectric crystal of interest for integrated photonics owing to its large second-order optical nonlinearity and the ability to impart perio…