most citedLSTM-PINN: An Hybrid Method for Prediction of Steady-State Electrohydrodynamic Flow

6 citations · 6 across the 15 of their papers we have counts for

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math-ph2025

Operator-Consistent Physics-Informed Learning for Wafer Thermal Reconstruction in Lithography

Ze Tao, Fujun Liu, Yuxi Jin +6

Thermal field reconstruction in post-exposure bake (PEB) is critical for advanced lithography, yet current physics-informed neural networks (PINNs) suffer from inconsistent accurac…