5 papers
Counter-rotating density and current structures in a partially magnetized plasma
Pengze Xiao, Ya Zhang, Hongyu Wang +2
The first 3D kinetic simulation of a magnetron discharge reproduces the measured rotating spoke and reveals that density and current rotate in opposite directions: the spoke…
Control of Electron Energy Distribution Functions by Current Waveform Tailoring in Inductively Coupled Radio Frequency Plasmas
Zhaoyu Chen, Zili Chen, Yu Wang +6
Based on two-dimensional particle-in-cell simulations a novel approach towards Electron Energy Probability Function (EEPF) and plasma chemistry control by Current Waveform Tailorin…
Breakdown modes of capacitively coupled plasma II: unsustainable discharges
Hao Wu, Ran An, Dong Zhong +2
In this work, the one-dimensional implicit particle-in-cell/Monte-Carlo collision code (PIC/MCC) is used to study the discharge of a capacitively coupled plasma (CCP) under extreme…
Breakdown modes of capacitively coupled plasma I: transitions from glow discharge to multipactor
Hao Wu, Ran An, Dong Zhong +2
In this work, a one-dimensional direct implicit particle-in-cell/Monte Carlo collision (PIC/MCC) code is used to study the capacitive discharge driven under 60 MHz rf power in the…
Electrical Characteristics of the GEC Reference Cell with Impedance Matching: A Two-Dimensional PIC/MCC Modeling Study
Zili Chen, Hongyu Wang, Shimin Yu +5
In this paper, the electrical characteristics of the Gaseous Electronics Conference (GEC) reference cell with impedance matching are investigated through a two-dimensional electros…