2 papers
physics.plasm-ph2026
Control of Electron Energy Distribution Functions by Current Waveform Tailoring in Inductively Coupled Radio Frequency Plasmas
Zhaoyu Chen, Zili Chen, Yu Wang +6
Based on two-dimensional particle-in-cell simulations a novel approach towards Electron Energy Probability Function (EEPF) and plasma chemistry control by Current Waveform Tailorin…
physics.plasm-ph2023
Electrical Characteristics of the GEC Reference Cell with Impedance Matching: A Two-Dimensional PIC/MCC Modeling Study
Zili Chen, Hongyu Wang, Shimin Yu +5
In this paper, the electrical characteristics of the Gaseous Electronics Conference (GEC) reference cell with impedance matching are investigated through a two-dimensional electros…