4 papers
Experimental setup for testing nanocalorimeter sensors as a plasma diagnostics tool
Carles Corbella, Feng Yi, Andrei Kolmakov
The application of microfabricated nanocalorimeters for real-time, highly sensitive, and selective monitoring of the energy fluxes from low-pressure plasma discharges has been repo…
Understanding microfabricated nanocalorimeter performance and responses to the energy fluxes from low-temperature plasma discharges
Carles Corbella, Feng Yi, Andrei Kolmakov
Plasma diagnostics have a shortage of fast and sensitive calorimetric sensors that can track substrate temperature during plasma-assisted microfabrication. In this work, energy flu…
Toward the Origins of Binding Energy Shifts and Satellites Formation During Plasma-XPS Measurements
J. Trey Diulus, Ashley R. Head, Jorge Anibal Boscoboinik +3
In plasma X ray photoelectron spectroscopy emerges as a powerful platform for real time, in situ chemical analysis under conditions relevant to semiconductor processing and other p…
Operando XPS in Reactive Plasmas: The Importance of The Wall Reactions
J. Trey Diulus, Ashley R. Head, Jorge Anibal Boscoboinik +1
Advancements in differential pumping and electron optics over the past few decades have enabled x-ray photoelectron spectroscopy (XPS) measurements at (near-)ambient pressures, bri…