2 papers
physics.plasm-ph2026
Experimental setup for testing nanocalorimeter sensors as a plasma diagnostics tool
Carles Corbella, Feng Yi, Andrei Kolmakov
The application of microfabricated nanocalorimeters for real-time, highly sensitive, and selective monitoring of the energy fluxes from low-pressure plasma discharges has been repo…
physics.plasm-ph2026
Understanding microfabricated nanocalorimeter performance and responses to the energy fluxes from low-temperature plasma discharges
Carles Corbella, Feng Yi, Andrei Kolmakov
Plasma diagnostics have a shortage of fast and sensitive calorimetric sensors that can track substrate temperature during plasma-assisted microfabrication. In this work, energy flu…