1 citations · 1 across the 3 of their papers we have counts for
4 papers
Tantalum Damascene Coplanar Waveguide Resonators Fabricated Using 300 mm Scale Processes
Ekta Bhatia, Yingge Du, Krishna P Koirala +12
Surface oxides contribute to losses in superconducting transmon devices resulting in degraded performance. We explore the use of the damascene process to replace the sidewall nativ…
Effects of Integrated Heatsinking on Superconductivity in Tantalum Nitride Nanowires at the 300 Millimeter Scale
Ekta Bhatia, Tharanga R. Nanayakkara, Chenyu Zhou +14
We report the superconducting properties of tantalum nitride (TaN) nanowires and TaN/copper (TaN/Cu) bilayer nanowires fabricated on 300 mm silicon wafers using CMOS-compatible pro…
Revealing the Origin and Nature of the Buried Metal-Substrate Interface Layer in Ta/Sapphire Superconducting Films
Aswin kumar Anbalagan, Rebecca Cummings, Chenyu Zhou +14
Despite constituting a smaller fraction of the qubits electromagnetic mode, surfaces and interfaces can exert significant influence as sources of high-loss tangents, which brings f…
Eliminating Surface Oxides of Superconducting Circuits with Noble Metal Encapsulation
Ray D. Chang, Nana Shumiya, Russell A. McLellan +15
The lifetime of superconducting qubits is limited by dielectric loss, and a major source of dielectric loss is the native oxide present at the surface of the superconducting metal.…